当社の
半導体デバイス3次元TCADシステム Advance/TCAD のユーザー様、明治大学 教授 堤 利幸 様が、
Advance/TCAD を用いた研究成果
を発表されました。
- Toshiyuki Tsutsumi and Jaeyup Lee,
"Study of threshold voltage fluctuation caused by source and drain extensions
doping variation of tri-gate fin-type FET using three-dimensional device simulation",
2014 Japanese Journal of Applied Physics, 53, 06JE06.
[Abstract] - Toshiyuki Tsutsumi,
"Three-dimensional exploration of the origin of threshold voltage fluctuation of silicon-on-insulator triple-gate fin-type field-effect transistors caused by ion implantation
to source and drain extensions",
2019 Japanese Journal of Applied Physics 58, SDDE06.
[Abstract] - Toshiyuki Tsutsumi,
"Dependence of three-dimensional bottleneck barrier height minimum on threshold voltage fluctuated by ion implantation of source and drain extensions in silicon-on-insulator
triple-gate fin-type field-effect transistors",
2020 Japanese Journal of Applied Physics 59, SIIE06.
[Abstract]